Capabilities
- Manufacture of advanced resist material in ISO accredited facilities at both small/evaluation scale and commercial supply volumes.
- Defined products with appropriate global patent protection and undisclosed know how.
- Robust performance data for products obtained in ISO class 5 clean-rooms.
- In-house R&D capability for customers seeking customised products.
- Supply of resists utilising customers’ preferred solvents and developers.
- Established links to global networks including academia, R&D labs, supply chain and end users.
Using an acceleration voltage of 30 KeV, 20 nm half pitch lines that have been patterned into resist.